Comparison of the chemical structure and composition between N[sub 2]O oxides and reoxidized

Bhat, M.; Ahn, J.
February 1994
Applied Physics Letters;2/28/1994, Vol. 64 Issue 9, p1168
Academic Journal
Investigates the chemical structure and composition of ultrathin N[sub 2]O oxides using angle resolved x-ray photoelectron spectroscopy. Decomposition of the nitrogen spectra for N[sub 2]O oxide; Difference in binding energy of silicon (Si) from the N[sub 2]O oxide and Si substrate; Changes in the difference of the binding energies between Si and oxygen in the N[sub 2]O oxide.


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