Spectroscopic ellipsometry of Si[sub 1-x]Ge[sub x] epilayers of arbitrary composition

Carline, R.T.; Pickering, C.
February 1994
Applied Physics Letters;2/28/1994, Vol. 64 Issue 9, p1114
Academic Journal
Investigates the critical point (CP) transition energies for strained Si[sub 1-x]Ge[sub x] from Lorentzian fits. Advantages of using spectroscopic ellipsometry (SE); Effects of the strain on CP transition energies; Importance of using strained reference spectra for accurate estimation of composition in SE analysis of strained heterostructures.


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