TITLE

Spectroscopic ellipsometry of Si[sub 1-x]Ge[sub x] epilayers of arbitrary composition

AUTHOR(S)
Carline, R.T.; Pickering, C.
PUB. DATE
February 1994
SOURCE
Applied Physics Letters;2/28/1994, Vol. 64 Issue 9, p1114
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the critical point (CP) transition energies for strained Si[sub 1-x]Ge[sub x] from Lorentzian fits. Advantages of using spectroscopic ellipsometry (SE); Effects of the strain on CP transition energies; Importance of using strained reference spectra for accurate estimation of composition in SE analysis of strained heterostructures.
ACCESSION #
4266556

 

Related Articles

  • Interband transitions and dielectric functions of InGaSb alloys. Kim, T. J.; Yoon, J. J.; Byun, J. S.; Hwang, S. Y.; Aspnes, D. E.; Shin, S. H.; Song, J. D.; Liang, C.-T.; Chang, Y.-C.; Barange, N. S.; Kim, J. Y.; Kim, Y. D. // Applied Physics Letters;3/11/2013, Vol. 102 Issue 10, p102109 

    We report pseudodielectric functions of In1-xGaxSb ternary alloy films from 1.5 to 6.0 eV determined by spectroscopic ellipsometry. Artifacts were minimized by real-time assessment of overlayer removal, leading to accurate representations of the bulk dielectric responses of these materials....

  • Effect of overlayers on critical-point parameters in the analysis of ellipsometric spectra. Jung, Y. W.; Ghong, T. H.; Kim, Y. D.; Aspnes, D. E. // Applied Physics Letters;9/17/2007, Vol. 91 Issue 12, p121903 

    As the complete removal of overlayers may not be possible in general, the authors investigate the effect of incomplete removal on critical-point parameters in the analysis of ellipsometric data. Using an approximate analytic expression, they show that energies and broadening parameters are much...

  • Ellipsometric study of the poling effect on nonlinear-optical side-chain polymers containing disperse red 1. Lee, Ho Suk; Kang, Tae Dong; Lee, Hosun; Lee, Sang Kyu; Kim, Ju Hee; Choi, Dong Hoon // Journal of Applied Physics;7/1/2007, Vol. 102 Issue 1, p013514 

    The purpose of this work is to investigate the effect of corona poling on the optical functions of the nonlinear-optical (NLO) polymers. We measured the complex refractive indices of NLO polymers deposited on glasses before and after corona poling using spectroscopic ellipsometry at room...

  • Effect of nitrogen on the GaAs0.9-xNxSb0.1 dielectric function from the near-infrared to the ultraviolet. Ben Sedrine, N.; Bouhafs, C.; Harmand, J. C.; Chtourou, R.; Darakchieva, V. // Applied Physics Letters;11/15/2010, Vol. 97 Issue 20, p201903 

    We study the effect of nitrogen on the GaAs0.9-xNxSb0.1 (x=0.00, 0.65%, 1.06%, 1.45%, and 1.90%) alloy dielectric function by spectroscopic ellipsometry in the energy range from 0.73 to 4.75 eV. The compositional dependences of the critical points energies for the GaAs0.9-xNxSb0.1 are obtained....

  • Optical characterization of continuous compositional gradients in thin films by real time.... Sangbo Kim; Collins, R.W. // Applied Physics Letters;11/13/1995, Vol. 67 Issue 20, p3010 

    Presents an extension of an approach for real time spectroscopic ellipsometry data interpretation providing analysis of graded layers. Characterization of microstructurally graded amorphous silicon-carbon alloy thin film; Evolution of the instantaneous deposition rate; Application of common...

  • An ellipsometry study of a hydrogenated amorphous silicon based n-i structure. Collins, R. W.; Clark, A. H.; Guha, S.; Huang, C.-Y. // Journal of Applied Physics;5/15/1985, Vol. 57 Issue 10, p4566 

    Analyzes the structure of a hydrogenated amorphous silicon based n-1 two-layer system using spectroscopic ellipsometry measurements. Details on the experiment; Data analysis; Results of the study.

  • Novel fast spectroscopic rotating-polarizer ellipsometer. Straaijer, A.; Verbruggen, M. H. W.; de Nijs, J. M. M.; Brongersma, H. H. // Review of Scientific Instruments;Jun93, Vol. 64 Issue 6, p1468 

    A fast spectroscopic rotating-polarizer ellipsometer has been developed, The machine is equipped with a cascade arc as a light source, a 1024 element linear photodiode array for parallel data processing, and a fast data acquisition interface that allows for hardware averaging of the data prior...

  • Real time spectroscopic ellipsometry characterization of structural and thermal equilibration... Fujiwara, H.; Koh, Joohyun; Lee, Yeeheng; Wronski, C.R.; Collins, R.W. // Journal of Applied Physics;8/15/1998, Vol. 84 Issue 4, p2278 

    Focuses on the application of real time spectroscopic ellipsometry (RTSE) to investigate changes which occur by the near-surface optics. Occurrence of the near-surface optics; Reference to the use of the trimethylboron [B(CH3)3]; Analysis of changes in the RTSE data.

  • Ellipsometric study of AlInAs and AlGaP alloys. Rodríguez, J. M.; Armelles, G. // Journal of Applied Physics;1/15/1991, Vol. 69 Issue 2, p965 

    Determines the optical direct interband transitions in a set of AlInAs and AlGaP alloys by using spectroscopic ellipsometry. Factor that made it possible to obtain a wide class of new materials with optical properties different from those of the binary compounds; Advantage of using the...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics