TITLE

On the nature of cross-hatch patterns on compositionally graded Si[sub 1-x]Ge[sub x] alloy layers

AUTHOR(S)
Shiryaev, Sergey Yu.; Jensen, Flemming
PUB. DATE
June 1994
SOURCE
Applied Physics Letters;6/13/1994, Vol. 64 Issue 24, p3305
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the effect of strain relaxation on the surface morphology of compositionally graded Si[sub 1-x]Ge[sub x] alloy layers. Implication of shear displacement for surface roughness; Formation of dislocation cluster networks; Contribution of surface plastic displacements to cross-hatch pattern formation.
ACCESSION #
4266521

 

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