Sintered aerosol masks for dry-etched quantum dots

Deppert, Knut; Maximov, Ivan
June 1994
Applied Physics Letters;6/13/1994, Vol. 64 Issue 24, p3293
Academic Journal
Examines the sintered aerosol masks for dry-etched quantum dots. Characterization of the reshaped silver particles; Basis on the generator described by Scheibel and Porstendorfer; Production of high density column arrays.


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