Growth of highly oriented ZrTiO[sub 4] thin films by radio-frequency magnetron sputtering

De-An Chang; Pang Lin
June 1994
Applied Physics Letters;6/13/1994, Vol. 64 Issue 24, p3252
Academic Journal
Examines the fabrication of zirconium titanate thin films using radio-frequency magnetron sputter deposition. Use of x-ray diffraction and transmission electron microscopy; Effect of crystalline substrate and thermal anneal on preferred orientation of as-grown films; Observation of good stoichiometric quality and thermal stability in thin films.


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