TITLE

Effects of dual spectral sources on the curing of polyimide films by rapid isothermal processing

AUTHOR(S)
Wait, M.A.; Mavoori, J.
PUB. DATE
June 1994
SOURCE
Applied Physics Letters;6/13/1994, Vol. 64 Issue 24, p3234
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effects of dual spectral sources on the curing of polyimide films by rapid isothermal processing (RIP). Comparison between conventional furnace processing and RIP; Reduction of processing temperature using vacuum ultraviolet (UV) and UV light sources with RIP; Importance of RIP for the future generation of semiconductor devices.
ACCESSION #
4266497

 

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