Effects of dual spectral sources on the curing of polyimide films by rapid isothermal processing

Wait, M.A.; Mavoori, J.
June 1994
Applied Physics Letters;6/13/1994, Vol. 64 Issue 24, p3234
Academic Journal
Examines the effects of dual spectral sources on the curing of polyimide films by rapid isothermal processing (RIP). Comparison between conventional furnace processing and RIP; Reduction of processing temperature using vacuum ultraviolet (UV) and UV light sources with RIP; Importance of RIP for the future generation of semiconductor devices.


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