TITLE

GaAs metal insulator semiconductor capacitors and high transconductance metal insulator

AUTHOR(S)
Reed, J.; Fan, Z.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/16/1994, Vol. 64 Issue 20, p2706
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Fabricates depletion mode gallium arsenide metal insulator semiconductor field effect transistors exhibiting transconductances. Use of Si[sub 3]N[sub 4] as the gate dielectric; Growth of Si[sub 3]N[sub 4]/Si/Ge insulator structure using a plasma-enhanced chemical vapor deposition system; Measurement of the lowest interface trap density.
ACCESSION #
4266473

 

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