Improved efficiency of crystalline silicon solar cells due to He[sup +] implantation

Bruns, J.; Seifert, W.
May 1994
Applied Physics Letters;5/16/1994, Vol. 64 Issue 20, p2700
Academic Journal
Investigates the influence of helium(He)[sup +] implantation on the properties of crystalline silicon solar cells. Implantation of 550 keV He[sup +] ions into the masked surface of solar cells; Formation of a two-dimensional defect layer inside the cell space-charge region; Increase of photocurrent without degenerating the values for open circuit voltage.


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