TITLE

Polycrystalline

AUTHOR(S)
Dat, R.; Lichtenwalner, D.J.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/16/1994, Vol. 64 Issue 20, p2673
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Uses pulsed laser ablation-deposition to produce ferroelectric capacitors by polycrystalline PbZr[sub 0.53]Ti[sub 0.47]O[sub 3] thin films on platinized silicon. Applications of dielectric and ferroelectric thin film capacitors; Attainment of fatigue-free ferroelectric capacitors; Formation of the ferroelectric perovskite phase.
ACCESSION #
4266462

 

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