Deep level transient spectroscopy characterization of ferroelectric Pb(Zr,Ti)O[sub 3] thin films

Baude, P.F.; Ye, C.
May 1994
Applied Physics Letters;5/16/1994, Vol. 64 Issue 20, p2670
Academic Journal
Investigates trap levels in sol-gel derived polycrystalline Pb(Zr,Ti)O[sub 3] thin films using deep level transient spectroscopy (DLTS). Fabrication of metal-ferroelectric-metal capacitor structures using a constant voltage DLTS system; Observation of prominent peaks associated with a single trap level; Measurement of the activation energy.


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