TITLE

Thermodynamic effects in depth profiling and ion-beam mixing without invoking thermal spikes

AUTHOR(S)
Kelly, Roger; Miotello, Antonio
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/16/1994, Vol. 64 Issue 20, p2649
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines thermodynamic effects in depth profiling and ion-beam mixing without invoking thermal spikes. Sensitivity of the extent of ion-beam mixing to the sign and magnitude of the heat of mixing; Analysis of the profiling experiments of Marton, Fine, and Chambers on multilayers of nickel-silver; Demonstration of thermal spikes by computer simulation.
ACCESSION #
4266454

 

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