Method for imaging sidewalls by atomic force microscopy

Martin, Yves; Wickramasinghe, H. Kumar
May 1994
Applied Physics Letters;5/9/1994, Vol. 64 Issue 19, p2498
Academic Journal
Demonstrates a method for imaging vertical and near vertical surface features by atomic force microscopy. Basis of the imaging; Achievement of surface profiling; Measurement of critical dimensions of line and trenches in integrated circuits; Modulation of vibration signal; Detection of small tip-sample forces.


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