Low resistance ohmic contacts on wide band-gap GaN

Lin, M.E.; Ma, Z.
February 1994
Applied Physics Letters;2/21/1994, Vol. 64 Issue 8, p1003
Academic Journal
Examines the metal contacts on gallium nitride using titanium, aluminum and gold. Application of the metallization process for low resistance ohmic contacts; Deposition of the metals via electron-beam evaporation; Investigation of the metallurgy of contact formation by Auger electron spectroscopy.


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