TITLE

Low resistance ohmic contacts on wide band-gap GaN

AUTHOR(S)
Lin, M.E.; Ma, Z.
PUB. DATE
February 1994
SOURCE
Applied Physics Letters;2/21/1994, Vol. 64 Issue 8, p1003
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the metal contacts on gallium nitride using titanium, aluminum and gold. Application of the metallization process for low resistance ohmic contacts; Deposition of the metals via electron-beam evaporation; Investigation of the metallurgy of contact formation by Auger electron spectroscopy.
ACCESSION #
4266378

 

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