Effects of local facet and lattice damage on nucleation of diamond grown by microwave plasma

Lin, S.J.; Lee, S.L.
March 1992
Applied Physics Letters;3/30/1992, Vol. 60 Issue 13, p1559
Academic Journal
Compares the effects induced by local facet and lattice damage on nucleation of diamond grown by microwave plasma chemical vapor deposition. Use of anisotropic etched silicon (Si) and ion implanted Si substrate to isolate the effects; Dependence of diamond deposition on ion implantation dosage; Reason for diamond nucleation on ion implanted Si substrates.


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