TITLE

Effects of local facet and lattice damage on nucleation of diamond grown by microwave plasma

AUTHOR(S)
Lin, S.J.; Lee, S.L.
PUB. DATE
March 1992
SOURCE
Applied Physics Letters;3/30/1992, Vol. 60 Issue 13, p1559
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Compares the effects induced by local facet and lattice damage on nucleation of diamond grown by microwave plasma chemical vapor deposition. Use of anisotropic etched silicon (Si) and ion implanted Si substrate to isolate the effects; Dependence of diamond deposition on ion implantation dosage; Reason for diamond nucleation on ion implanted Si substrates.
ACCESSION #
4266332

 

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