TITLE

Composition and strain in SiGe/Si(001) “nanorings” revealed by combined x-ray and selective wet chemical etching methods

AUTHOR(S)
Stoffel, M.; Malachias, A.; Rastelli, A.; Metzger, T. H.; Schmidt, O. G.
PUB. DATE
June 2009
SOURCE
Applied Physics Letters;6/22/2009, Vol. 94 Issue 25, p253114
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The authors used x-ray diffraction to investigate strain and composition in SiGe nanorings formed during partial Si capping of self-assembled SiGe/Si(001) islands. The obtained results are corroborated with selective wet chemical etching experiments. Clear evidence is provided that rings are composed of a Ge rich core surrounded by Si richer ridges indicating that a substantial material redistribution occurs during the shape transformation from SiGe islands to rings. The results suggest that SiGe ring formation is driven by strain relief.
ACCESSION #
42642381

 

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