Nanostructures and chemistry of a (100)MgO/(100)GaAs interface

Bruley, J.; Stemmer, S.
August 1994
Applied Physics Letters;8/1/1994, Vol. 65 Issue 5, p564
Academic Journal
Examines the epitaxial growth of magnesium oxide films on gallium arsenide (GaAs) by magnetron sputtering. Observation of the growth using high-resolution transmission electron microscopy; Influence of oxygen vapor pressure on the stoichiometry of GaAs surface; Comparison between the rate of oxidation of GaAs and the rate of etching of the oxide.


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