TITLE

Nonlocal electron kinetics in a low-pressure inductively coupled radio-frequency discharge

AUTHOR(S)
Kolobov, V.I.; Beale, D.F.
PUB. DATE
August 1994
SOURCE
Applied Physics Letters;8/1/1994, Vol. 65 Issue 5, p537
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Analyzes the Boltzmann equation for electrons. Spatially resolved probe measurements of the electron distribution function; Explanation of the pressure dependence of the light emission distribution; Basis of nonlocal electron kinetics.
ACCESSION #
4258410

 

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