Formation of lanthanum strontium cobalt thin films by metalorganic decomposition

Mantese, Joseph V.; Micheli, Adolph L.
June 1994
Applied Physics Letters;6/20/1994, Vol. 64 Issue 25, p3509
Academic Journal
Describes the formation of electrically conductive La[sub 0.5]Sr[sub 0.5]CoO[sub 3] thin films on a variety of substrates by metal organic decomposition. Obtainment of the lowest resistivity films on c-axis sapphire; Limitation of the film conductivity by the diffusion of strontium into the substrate; Importance of rapid thermal processing.


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