TITLE

Effects of wafer bow and warpage on the integrity of thin gate oxides

AUTHOR(S)
Thakur, R.P.S.; Chhabra, N.
PUB. DATE
June 1994
SOURCE
Applied Physics Letters;6/20/1994, Vol. 64 Issue 25, p3428
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the effects of initial wafer bow and warpage on the integrity of thinner gate oxides grown by furnace and rapid thermal processing methods. Correlation between wafer warpage and bow to the charge-to-breakdown characteristics of the gate oxide; Observation of an almost linear increase in defect density; Lifetime of the samples.
ACCESSION #
4258374

 

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