S[sub 2]Cl[sub 2] treatment: A new sulfur passivation method of GaAs surface

Li, Z.S.; Cai, W.Z.
June 1994
Applied Physics Letters;6/20/1994, Vol. 64 Issue 25, p3425
Academic Journal
Develops a S[sub 2]Cl[sub 2] treatment for the sulfur passivation of the gallium arsenide surface. Spectrum analyses used to study the passivated surfaces; Increase in the photoluminescence intensity by two orders of magnitude; Metals present in the sulfurized surface; Attachment of the sulfur atoms to both gallium and arsenic atoms.


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