Microstructure of epitaxial oxide thin film heterostructures on silicon by pulsed laser deposition

Ghonge, Subodh G.; Goo, Edward
June 1994
Applied Physics Letters;6/20/1994, Vol. 64 Issue 25, p3407
Academic Journal
Investigates the microstructure of epitaxial oxide thin film heterostructures on silicon by pulsed laser deposition. Result of x-ray diffraction and pole figure analysis; Performance of high resolution microscopy to study the crystal defects and interfacial structure; Role of bismuth titanate films as a template for epitaxial growth.


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