Running waveguide discharge for inner coating of metal tubes

Hytry, R.; Moller, W.
June 1994
Applied Physics Letters;6/20/1994, Vol. 64 Issue 25, p3401
Academic Journal
Develops a plasma-enhanced chemical vapor deposition process by means of the so-called running waveguide discharge. Deposition of amorphous hydrogenated carbon films on the inner wall of an assembled waveguide system; Increase of the average deposition rate; Use of argon plasma to study the breakdown of a discharge in the metallic waveguides.


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