Study and analysis of submicron-period grating formation on polymers ablated using a KrF laser

Dyer, P.E.; Farley, R.J.
June 1994
Applied Physics Letters;6/20/1994, Vol. 64 Issue 25, p3389
Academic Journal
Demonstrates the formation of submicron-period gratings in polyethylene terephthalate and polyimide films using a krypton fluoride laser irradiated phase mask. Dominance of d-spaced gratings on the ablated polymers; Average fluence behind the mask; Distribution of the local energy density.


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