TITLE

Oxidation resistant high conductivity copper films

AUTHOR(S)
Ding, P.J.; Lanford, W.A.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2897
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the electrical conductivity of copper films with percentages of magnesium as diffusion barrier. Effects of magnesium on the oxidation resistance of the films; Process for controlling the magnesium content in copper; Potential of copper for microelectronic circuits.
ACCESSION #
4258352

 

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