Oxidation resistant high conductivity copper films

Ding, P.J.; Lanford, W.A.
May 1994
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2897
Academic Journal
Investigates the electrical conductivity of copper films with percentages of magnesium as diffusion barrier. Effects of magnesium on the oxidation resistance of the films; Process for controlling the magnesium content in copper; Potential of copper for microelectronic circuits.


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