On the dispersion of electromigration failure times of Al alloy contacts to silicon

Oates, A.S.
May 1994
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2870
Academic Journal
Examines the electromigration failure times of aluminum alloy contacts to silicon. Relevance of electromigration failure data to circuit operating conditions; Dependence of the dispersion of failure times on temperature; Results of electromigration stressing of the contact structures.


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