TITLE

On the dispersion of electromigration failure times of Al alloy contacts to silicon

AUTHOR(S)
Oates, A.S.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2870
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electromigration failure times of aluminum alloy contacts to silicon. Relevance of electromigration failure data to circuit operating conditions; Dependence of the dispersion of failure times on temperature; Results of electromigration stressing of the contact structures.
ACCESSION #
4258343

 

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