Atomic desorption of chlorine adsorbed on Si(111) with a scanning tunneling microscope

Baba, Masakazu; Matsui, Shinji
May 1994
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2852
Academic Journal
Examines the selective atomic desorption of chlorine (Cl) atoms absorbed on silicon (Si) surface by field evaporation. Use of the scanning tunneling microscope to study the reaction of Cl on the surface; Reduction of the dangling bond states; Details of the surface tunneling conductance of Si adatoms.


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