Identification of a moving phase of Al[sub 2]O[sub 3] by Auger electron spectroscopy in the back

Chakravarty, B.C.; Arora, N.K.
May 1994
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2847
Academic Journal
Examines the moving phase of Al[sub 2]O[sub 3] in the backsurface aluminization of silicon solar cells through Auger electron spectroscopy. Depth profiles of silicon wafers; Details of surface etching parameters with argon ion sputtering; Formation of oxidized aluminum and alloy of aluminum and silicon interface.


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