Texture of vapor deposited parylene thin films

You, L.; Yang, G.-R.
May 1994
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2812
Academic Journal
Examines the texture of vapor deposited parylene thin films on silicon substrate through the x-ray pole figure technique. Percentage for the fiber texture component in the annealed thin films; Observation of crystalline phases in parylene samples; Details of crystallite and molecular orientations in thin films.


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