TITLE

Texture of vapor deposited parylene thin films

AUTHOR(S)
You, L.; Yang, G.-R.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2812
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the texture of vapor deposited parylene thin films on silicon substrate through the x-ray pole figure technique. Percentage for the fiber texture component in the annealed thin films; Observation of crystalline phases in parylene samples; Details of crystallite and molecular orientations in thin films.
ACCESSION #
4258323

 

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