TITLE

Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam source

AUTHOR(S)
Weiler, M.; Sattel, S.
PUB. DATE
May 1994
SOURCE
Applied Physics Letters;5/23/1994, Vol. 64 Issue 21, p2797
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the deposition of diamond-like amorphous hydrogenated carbon by a plasma beam source. Utilization of acetylene as the hydrocarbon source gas; Determination of ion energy distribution, film thickness and mass gain; Factors contributing to the tetrahedral nature of diamond-like carbons.
ACCESSION #
4258318

 

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