TITLE

Effect of hydrogen on surface roughening during Si homoepitaxial growth

AUTHOR(S)
Adams, D.P.; Yalisove, S.M.
PUB. DATE
December 1993
SOURCE
Applied Physics Letters;12/27/1993, Vol. 63 Issue 26, p3571
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the influence of hydrogen on the evolution of surface roughening during Si(100) homoepitaxy. Presence of surface roughness within the epitaxial film; Dependence of the rate at which the surface roughens on the partial pressure of deuterium; Observation on the crystalline to amorphous transition.
ACCESSION #
4258279

 

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