TITLE

Fabrication of high-quality superconductor-insulator-superconductor junctions on thin SiN membranes

AUTHOR(S)
Garcia, Edouard; Jacobson, Brian R.
PUB. DATE
August 1993
SOURCE
Applied Physics Letters;8/16/1993, Vol. 63 Issue 7, p1002
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents a method for fabricating superconductor-insulator-superconductor junctions on freestanding thin silicon nitride membranes. Applicability of the devices in millimeter wave and terahertz receiver devices; Use of potassium hydroxide as an anisotropic etchant; Current-voltage characteristics of the produced materials.
ACCESSION #
4258266

 

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