Fabrication of high-quality superconductor-insulator-superconductor junctions on thin SiN membranes

Garcia, Edouard; Jacobson, Brian R.
August 1993
Applied Physics Letters;8/16/1993, Vol. 63 Issue 7, p1002
Academic Journal
Presents a method for fabricating superconductor-insulator-superconductor junctions on freestanding thin silicon nitride membranes. Applicability of the devices in millimeter wave and terahertz receiver devices; Use of potassium hydroxide as an anisotropic etchant; Current-voltage characteristics of the produced materials.


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