Effects of propane and methane on carbonization and surface morphology in heteroepitaxial growth

Bahavar, B.; Chaudhry, M.I.
August 1993
Applied Physics Letters;8/16/1993, Vol. 63 Issue 7, p914
Academic Journal
Examines the effect of propane and methane on carbonization and surface morphology of beta-silicon carbide semiconductor films grown on (100) silicon via chemical vapor deposition. Comparison of film growth rates and carrier concentrations; Explanation of the surface growth pattern in terms of surface mobilities; Impact of hydrocarbons on nucleation.


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