Nanometer patterning of InP using aerosol and plasma etching techniques

Wiedensohler, Alfred; Hansson, Hans-Christen
August 1992
Applied Physics Letters;8/17/1992, Vol. 61 Issue 7, p837
Academic Journal
Fabricates nanometer sized columns of indium phosphide (InP) by applying aerosol and plasma etching techniques. Deposition of well-defined particles of silver; Production of silver particles through homogeneous nucleation out of silver vapor saturated nitrogen gas; Transfer of the silver particles into the InP material.


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