Cubic boron nitride films synthesized by low-energy ion-beam-enhanced vapor deposition

Ikeda, Tsutomu
August 1992
Applied Physics Letters;8/17/1992, Vol. 61 Issue 7, p786
Academic Journal
Examines cubic boron nitride films synthesized by low-energy ion-beam-enhanced vapor deposition. Result of the infrared spectra; Effect of the residual internal stress of the films; Components of the film microstructure.


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