TITLE

Cubic boron nitride films synthesized by low-energy ion-beam-enhanced vapor deposition

AUTHOR(S)
Ikeda, Tsutomu
PUB. DATE
August 1992
SOURCE
Applied Physics Letters;8/17/1992, Vol. 61 Issue 7, p786
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines cubic boron nitride films synthesized by low-energy ion-beam-enhanced vapor deposition. Result of the infrared spectra; Effect of the residual internal stress of the films; Components of the film microstructure.
ACCESSION #
4258185

 

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