Single-crystal Al films grown by sputtering on (111)Si substrates

Niwa, H.; Kato, Masaharu
May 1992
Applied Physics Letters;5/18/1992, Vol. 60 Issue 20, p2520
Academic Journal
Investigates the growth of single-crystal aluminum (Al) films on (111)silicon substrates by sputtering method. Application of transmission electron microscopy; Factors responsible for the failure of Al interconnects; Mechanisms involved in the elimination of small-angle boundaries.


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