TITLE

Single-crystal Al films grown by sputtering on (111)Si substrates

AUTHOR(S)
Niwa, H.; Kato, Masaharu
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/18/1992, Vol. 60 Issue 20, p2520
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates the growth of single-crystal aluminum (Al) films on (111)silicon substrates by sputtering method. Application of transmission electron microscopy; Factors responsible for the failure of Al interconnects; Mechanisms involved in the elimination of small-angle boundaries.
ACCESSION #
4258152

 

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