Investigations of the Si[sub 3]N[sub 4]/Si/n-GaAs insulator-semiconductor interface with low

Mui, D.S.L.; Biswas, D.
May 1992
Applied Physics Letters;5/18/1992, Vol. 60 Issue 20, p2511
Academic Journal
Investigates the interface properties of Si[sub 3]N[sub 4]/silicon/n-gallium arsenide insulator-semiconductor capacitors. Value of the lowest interface trap density; Significance of the quasi-static capacitance-voltage curve; Factors attributed to the anomalous frequency dispersion of the measured capacitance.


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