Excimer laser ablated strontium titanate thin films for dynamic random access memory applications

Roy, D.; Peng, C.J.
May 1992
Applied Physics Letters;5/18/1992, Vol. 60 Issue 20, p2478
Academic Journal
Presents excimer laser ablated strontium titanate thin films for dynamic random access memory applications. Deposition of thin films on platinum coated and bare silicon; Characterization of films deposited at 500 degree Celsius; Indication for the charge-voltage behavior of metal-insulator-metal and metal-insulator-semiconductor structures.


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