TITLE

Excimer laser ablated strontium titanate thin films for dynamic random access memory applications

AUTHOR(S)
Roy, D.; Peng, C.J.
PUB. DATE
May 1992
SOURCE
Applied Physics Letters;5/18/1992, Vol. 60 Issue 20, p2478
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents excimer laser ablated strontium titanate thin films for dynamic random access memory applications. Deposition of thin films on platinum coated and bare silicon; Characterization of films deposited at 500 degree Celsius; Indication for the charge-voltage behavior of metal-insulator-metal and metal-insulator-semiconductor structures.
ACCESSION #
4258137

 

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