TITLE

Growth of high quality amorphous silicon films with significantly improved stability

AUTHOR(S)
Dalal, Vikram L.; Ping, E.X.
PUB. DATE
April 1994
SOURCE
Applied Physics Letters;4/4/1994, Vol. 64 Issue 14, p1862
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the improved stability of amorphous silicon (a-Si:H) films. Effects of boron on the microstructure of a-Si:H; Production of high quality films by low hydrogen concentration; Need for excessive Si--H bonding to achieve stable a-Si:H film.
ACCESSION #
4255105

 

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