Growth of high quality amorphous silicon films with significantly improved stability

Dalal, Vikram L.; Ping, E.X.
April 1994
Applied Physics Letters;4/4/1994, Vol. 64 Issue 14, p1862
Academic Journal
Examines the improved stability of amorphous silicon (a-Si:H) films. Effects of boron on the microstructure of a-Si:H; Production of high quality films by low hydrogen concentration; Need for excessive Si--H bonding to achieve stable a-Si:H film.


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