TITLE

Bonding partner change reaction in oxidation of Ge on Si(001): Observation of two step formation

AUTHOR(S)
Prabhakaran, K.; Ogino, T.
PUB. DATE
April 1994
SOURCE
Applied Physics Letters;4/4/1994, Vol. 64 Issue 14, p1839
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Investigates bonding partner change reaction of oxygen (O) from germanium (Ge) to silicon (Si) substrates. Formation of silica from Ge to Si by annealing; Breakage of Ge--O bonds to form Si suboxides; Rearrangement of Si--O bonds to form silica.
ACCESSION #
4255097

 

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