TITLE

Two-dimensional model of ion dynamics during plasma source ion implantation

AUTHOR(S)
Sheridan, T.E.; Alport, M.J.
PUB. DATE
April 1994
SOURCE
Applied Physics Letters;4/4/1994, Vol. 64 Issue 14, p1783
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Presents the two-dimensional model of ion dynamics during plasma source ion implantation. Use of bar size in terms of ion-matrix sheath width as parameters; Display of ion density during the simulation; Application of the model for several geometric studies.
ACCESSION #
4255078

 

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