TITLE

Frequency effects in capacitively coupled radio-frequency glow discharges: A comparison between

AUTHOR(S)
Meijer, P.M.; Passchier, J.D.P.
PUB. DATE
April 1994
SOURCE
Applied Physics Letters;4/4/1994, Vol. 64 Issue 14, p1780
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Compares the frequency effects in coupled radio-frequency (rf) glow discharges between experiments and two-dimensional (2D) fluid model. Agreements between the two for autobias voltage and dissipated power; Prediction of autobias voltage at different pressure by the 2D model; Relationship between applied rf voltage and dc bias voltage.
ACCESSION #
4255077

 

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