Spectroscopic ellipsometric measurements of the dielectric function of germanium dioxide films

Hu, Y.Z.; Zettler, J.-Th.
August 1992
Applied Physics Letters;8/31/1992, Vol. 61 Issue 9, p1098
Academic Journal
Determines the dielectric function of germanium dioxide GeO[sub 2] films on germanium crystals from spectroscopic ellipsometry measurements. Energy range of ellipsometry; Use of the Kramers-Kronig consistent dispersion formula; Analysis of oxide growth via a parabolic growth law; Value of the GeO[sub 2] growth constant.


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