In situ infrared and mass spectroscopic study of the reaction of WF[sub 6] with hydrogenated

Wadayama, Toshimasa; Shibata, Hironobu
August 1992
Applied Physics Letters;8/31/1992, Vol. 61 Issue 9, p1060
Academic Journal
Investigates the reaction process of tungsten hexafluoride (WF[sub 6]) with hydrogenated amorphous silicon by polarization modulation infrared (IR) spectroscopy and quadruple mass spectrometry. Effect of WF[sub 6] exposure on IR adsorption bands; Comparison of the SiH[sub 3] reduction rate with SiH[sub 2] species; Evolution of hydrogen into gas phase.


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