TITLE

Temperature-dependence of the growth orientation of atomic layer growth MgO

AUTHOR(S)
Huang, Ron; Kitai, Adrian H.
PUB. DATE
September 1992
SOURCE
Applied Physics Letters;9/21/1992, Vol. 61 Issue 12, p1450
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the formation of magnesium oxide (MgO) thin films by hydrolysis surface reaction. Growth of MgO films by atomic layer growth; Deposition of MgO on silicon substrate; Effect of temperature on the growth orientation of MgO.
ACCESSION #
4255013

 

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