Temperature-dependence of the growth orientation of atomic layer growth MgO

Huang, Ron; Kitai, Adrian H.
September 1992
Applied Physics Letters;9/21/1992, Vol. 61 Issue 12, p1450
Academic Journal
Examines the formation of magnesium oxide (MgO) thin films by hydrolysis surface reaction. Growth of MgO films by atomic layer growth; Deposition of MgO on silicon substrate; Effect of temperature on the growth orientation of MgO.


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