Measurements of film carrier lifetimes in silicon-on-insulator wafers by a contactless dual-beam

Ping-Chang Yang; Li, Sheng S.
September 1992
Applied Physics Letters;9/21/1992, Vol. 61 Issue 12, p1408
Academic Journal
Examines the excess carrier lifetimes in silicon-on-insulator wafers by contactless dual-beam optical modulation technique (DBOM). Basis of the DBOM method on the infrared probe team; Explanation of excess carrier lifetimes by defect density; Comparison of excess carrier lifetimes between films and separation by implantation of oxygen wafers.


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