Growth kinetics of (100), (110), and (111) homoepitaxial diamond films

Chu, C.J.; Hauge, R.H.
September 1992
Applied Physics Letters;9/21/1992, Vol. 61 Issue 12, p1393
Academic Journal
Investigates the growth kinetics of diamond films on natural diamond substrates by hot-filament chemical vapor deposition. Dependence of diamond film growth on methane flow rate; Increase of diamond film growth with temperature; Relationship between growth rate and surface morphology.


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