TITLE

Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F[sub 2]

AUTHOR(S)
Sato, F.; Sunada, Y.
PUB. DATE
September 1992
SOURCE
Applied Physics Letters;9/21/1992, Vol. 61 Issue 12, p1378
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines ultralong pulse argon fluoride (ArF) emission in helium (He) plasma jet with Ar/F molecule neutral gas. Creation of Ar metastable atoms in high temperature HE plasma; Formation of ArF excimer molecules by Ar atoms; Disturbance of He plasma jet by second gas jet.
ACCESSION #
4254988

 

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