Epitaxial growth of (001) Al on (111) Si by vapor deposition

Thangaraj, N.; Westmacott, K.H.
August 1992
Applied Physics Letters;8/24/1992, Vol. 61 Issue 8, p913
Academic Journal
Analyzes the heteroepitaxial growth of (001) aluminum (Al) thin films on silicon (Si) (111) single crystal substrates by vapor deposition. List of the orientation variants of the (001) Al pattern; Quality of epitaxial alignment between Al (001) and Si (111); Structure of the Al/Si interface.


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