TITLE

X-ray absorption study of the atomic environment in Sb[sup +] and Sb[sup +]/B[sup +] implanted

AUTHOR(S)
Allain, J.L.; Bourret, A.
PUB. DATE
July 1992
SOURCE
Applied Physics Letters;7/20/1992, Vol. 61 Issue 3, p264
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Examines the electrical deactivation of antimony atoms implanted in crystalline silicon by extended x-ray absorption fine structure method. Description of the deactivation process; Existence of vacancy complexes; Suspension of the precipitation of antimony particles; Formation of antimony-boron pairs; Stabilization of the complexes.
ACCESSION #
4254898

 

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