Improved solid phase epitaxial growth of lithium tantalate thin films on sapphire, using a

Wernberg, Alex A.; Braunstein, Gabriel H.
November 1993
Applied Physics Letters;11/8/1993, Vol. 63 Issue 19, p2649
Academic Journal
Examines the solid phase epitaxial growth of lithium tantalate thin films on sapphire using chemical-vapor deposition process. Implication of the crystalline quality improvements for the surface of buffer layers; Presentation of the ion channeling analyses of the films; Advantage of using thick buffer layers.


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